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Vapor Deposition Materials

Refractive Index all Low refractive Medium refractive High refractive Metal Functional material

Vapor Deposition Materials

Classifica tion	Refrac tive Index	Product Name	Chemical Formula	MP(℃)	BP(℃)	Transmi ttance Range (㎛)	Density (g/㎤)	Stress	Evapo ration source	Granule	Pellet
Low refractive	1.34	Natrium fluoride	NaF	993	1695	0.25-10	2.56		E	○
	1.35	Cryolite	Na3AlF6	1000		0.2-10	2.9	T+	M,T,E	○
	1.35	Chiolite	Na5 Al3F14	1030		0.2-12	2.9	T+	M,T,E	○
	1.36	Lithium fluoride	LiF	848	1676	0.15-7	2.64	T+	M,E	○
	1.38	Magnesium fluoride	MgF2	1248	2260	0.2-5	3.18	T+++	W,M,T,E	○	○
	1.40	Aluminium fluoride	AlF3	1290	(sublimation)	0.2-20	2.88	T+	E	○
	1.40	Calcium fluoride	CaF2	1373	2500	0.15-10	3.18		W,T,E	○	○
	1.40	Strontium fluoride	SrF2	1190	2460		4.2		E	○
	1.45	Zirconium fluoride	ZrF4		sublimes at 600℃	4-12	4.43		E	○
	1.47	Silicon dioxide	SiO2	1710℃ (softening point)		0.2-10	2.2	C+++	E	○	○
	1.48	Barium fluoride	BaF2	1354	2260	0.15-13	4.83		E	○	○
	1.49	Yttrium fluoride	YF3	1152	2230				E	○
Medium refractive	1.50	OL-B	SiO2+ Al2O3			0.4-7		T+	E	○	○
	1.59	Lanthanum fluoride	LaF3	1493	2327	0.2-12	5.94	T+	E	○
	1.60	Neodymium fluoride	NdF3	1374	2327	0.2-2	6.51	T+	E	○
	1.62	Gadolinium fluoride	GdF3	1231	2277	0.2-8		T+	E	○
	1.63	Cerium fluoride	CeF3	1460	2300	0.3-10	6.16	T++	M,T,E	○	○
	1.64	Aluminium oxide	Al2O3	2055	2980	0.2-7	4	T++	E	○
	1.70	Tungsten oxide	WO3	1473	1750		7.16		W,P,E	○	○
	1.72	Magnesium oxide	MgO	2852	3600	0.2-7	3.58	T+	E	○
	1.75	Lead fluoride	PbF2	855	1290	0.3-15	8.24		W,E	○
	1.80	Silicon monoxide	SiO	1700℃ and over		0.6-10	2.24	T/C	M,T,E	○	○
	1.84	Lanthanum oxide	La2O3	2187-2300		0.3-8	6.51		E	○
	1.88	Yttrium oxide	Y2O3	2356-2435		0.3-8	5.01	C+++	E	○	○
	1.89	Scandium oxide	Sc2O3	2383-2423		0.3-8	3.86		E	○	○
	1.90	Europium oxide	Eu2O3	approx. 2100℃					E	○
	1.90	Molybdenum oxide	MoO3	795	1155		4.7		E,M	○
	1.90	Samarium fluoride	SmF3	1306	2427		7.1	T+	E	○
	1.92	Praseodymium oxide	Pr6O11			0.3-10			W,E	○
High refractive	2.00	Indium oxide	In2O3	decomposes at 700℃			7.18		W,T,M,E	○	○
	2.00	Tin oxide	SnO2	1127	sublimes at approx.1850℃				W,E	○	○
	2.05	Hafnium oxide	HfO2	2758		0.25-10	9.68	T++	E	○	○
	2.05	Tantalum pentoxide	Ta2O5		decomposes at 1470℃	0.3-10	7.3-8.2	T++	E	○	○
	2.05	Zirconium dioxide	ZrO2	2700	4300	0.3-7	5.49	T+	E		○
	2.10	Dysprosium trioxide	Sb2O3	656	1425	0.3-1	5.2		E	○
	2.10	Zinc oxide	ZnO		sublimes at 1720℃	0.3-8	5.61		E	○	○
	2.13	Cerium dioxide	CeO2	2600	(sublimation)	0.4-16	7.13	C+	W,E	○
	2.13	OS-5	ZrO2+ TiO2			0.4-7	4.5	T+	E		○
	2.15	Neodymium oxide	Nd2O3	2192-2310		0.2-2	7.24		E	○
	2.20	Columbium pentoxide	Nb2O5	1520			4.3-5.2	T+	E	○
	2.30	Zinc sulfide	ZnS	1800-1900	sublimes at 1180℃	0.4-15	4.09	C++	M,E	○	○
	2.35	Titanium sesquioxide	Ti2O3		decomposes at 2130℃	0.4-10	4.6	T+++	W,E	○	○
	2.35	Trititanium pentoxide	Ti3O5			0.4-10	4.2	T+++	W,E	○	○
	2.35	Titanium monoxide	TiO	1750	3000℃ and over	0.4-10	4.93	T+++	W,E	○
	2.35	Titanium dioxide	TiO2	1825	decomposes at 3000℃ and over	0.4-10	4.17	T+++	E	○	○
	3.4 (2μm)	Silicon	Si	1414	2642		2.34	T++	W,E	○
	4.4 (2μm)	Germanium	Ge	959	2691		5.4		W,M,T,E	○
Metal		Silver	Ag	962	2184		10.5	T+	M,T,E	○
		Aluminum	Al	659	2270		2.7		W,E	○
		Gold	Au	1063	2710		19.3	T+	W,M,E	○
		Chromium	Cr	1890	2212		7.2	T++	W,E	○
		Copper	Cu	1085	2580		8.93	T+	W,M,T,E	○
		Hafnium	Hf	1700			13.3		E	○
		Indium	In	156	2100		7.3		W,M,E	○
		Molybdenum	Mo	2610	4800		10.2	T++		○
		Nickel	Ni	1455	2721		8.85	T++	W,E	○
		Platinum	Pt	1773	3800		21.4	T++	W,E	○
		Tantalum	Ta	2996	5300		16.6		E	○
		Titanium	Ti	1675	3262		4.54	C/T+	W,T,E	○
		Tungsten	W	3387	5900		19.1		E	○
Functional material		ITO	In2O3+ SnO2	Transparent conductive film		0.4-7			E	○	○
		MS-DC100		Water repellent material					W,M,T,E		○
		MS-SY		Super Hydrophobic material					W,M,T,E		○

Stress
C：Compressive stress
T：Tensile stress
+：Weak
++：Medium
+++：Strong

Evaporation source
E：E-gun
W：Tungsten boat
M：Molybdenum boat
T：Tantalum boat